Multiple Project Wafers (MPW)
AMF offers a regular MPW shuttle
| Shuttle Run for 2023 | Run 1 | Run 2 | Run 3 | Run 4 | Run 5 | Run 6 |
|---|---|---|---|---|---|---|
| Final/Clean GDS Submission Due Date* | 1 Feb | 1 Apr | 1 Jun | 1 Aug | 1 Oct | 1 Dec |
* Please submit GDS early (eg. 2-3 weeks prior to the due date) for design rule check. Max 3 DRC iterations by AMF. Any DRC violation must be waived by this date.
Our MPW runs on both our SOI and SiN-on-SOI Platforms and is the ideal starting point to validate your designs. It supports a wide range of devices and is available for both
| Process | 193 & 248 lithography |
|---|---|
| Deep silicon trench for edge coupling | |
| Implantations for high speed modulators | |
| Germanium epitaxy for photodetectors | |
| TiN heater and 2 Al metal layers | |
| Oxide cladding open for exposed waveguides in sensing application |
Our team of experts will assist you with the Design Rule Check and will follow-up on the results of your shuttle to support a smooth transfer of your successful designs to a tailored custom prototyping run preparing for production.
For further details about complete list of processes and PDK devices supported in our MPW shuttles, please contact us directly.