Multiple Project Wafers (MPW)
AMF offers a regular MPW shuttle six times a year following the schedule below.
|Shuttle Run||2022 Dec||2023 Run 1||2023 Run 2||2023 Run 3||2023 Run 4||2023 Run 5||2023 Run 6|
|Final/Clean GDS Submission Due Date*||15 Dec 2022||15 Feb 2023||14 Apr 2023||15 Jun 2023||15 Aug 2023||16 Oct 2023||15 Dec 2023|
Our MPW runs on both our SOI and SiN-on-SOI Platforms and is the ideal starting point to validate your designs. It supports a wide range of devices and is available for both Active and Passive runs on both platforms. Our MPW process flow supports:
|Process||193 & 248 lithography|
|Deep silicon trench for edge coupling|
|6 implantations for high speed modulators|
|Germanium epitaxy for photodetectors|
|TiN heater and 2 Al metal layers|
|Oxide cladding open for exposed waveguides in sensing application|
Our team of experts will assist you with the Design Rule Check and will follow-up on the results of your shuttle to support a smooth transfer of your successful designs to a tailored custom prototyping run preparing for production.
For further details about complete list of processes and PDK devices supported in our MPW shuttles, please contact us directly.