Multiple Project Wafers (MPW)
AMF offers a regular MPW shuttle
|Shuttle Run for 2023||Run 1||Run 2||Run 3||Run 4||Run 5||Run 6|
|Final/Clean GDS Submission Due Date*||1 Feb||1 Apr||1 Jun||1 Aug||1 Oct||1 Dec|
* Please submit GDS early (eg. 2-3 weeks prior to the due date) for design rule check. Max 3 DRC iterations by AMF. Any DRC violation must be waived by this date.
Our MPW runs on both our SOI and SiN-on-SOI Platforms and is the ideal starting point to validate your designs. It supports a wide range of devices and is available for both
|Process||193 & 248 lithography|
|Deep silicon trench for edge coupling|
|Implantations for high speed modulators|
|Germanium epitaxy for photodetectors|
|TiN heater and 2 Al metal layers|
|Oxide cladding open for exposed waveguides in sensing application|
Our team of experts will assist you with the Design Rule Check and will follow-up on the results of your shuttle to support a smooth transfer of your successful designs to a tailored custom prototyping run preparing for production.
For further details about complete list of processes and PDK devices supported in our MPW shuttles, please contact us directly.