Multiple Project Wafers (MPW)

AMF offers a regular MPW shuttle six times a year following the schedule below.

Shuttle Run 2022 Dec 2023 Run 1 2023 Run 2 2023 Run 3 2023 Run 4 2023 Run 5 2023 Run 6
Final/Clean GDS Submission Due Date* 15 Dec 2022 15 Feb 2023 14 Apr 2023 15 Jun 2023 15 Aug 2023 16 Oct 2023 15 Dec 2023
* Please submit GDS early (eg. 2-3 weeks prior to the due date) for design rule check. Max 3 DRC iterations by AMF. Any DRC violation must be waived by this date.

Our MPW runs on both our SOI and SiN-on-SOI Platforms and is the ideal starting point to validate your designs. It supports a wide range of devices and is available for both Active and Passive runs on both platforms. Our MPW process flow supports:

Process 193 & 248 lithography
Deep silicon trench for edge coupling
6 implantations for high speed modulators
Germanium epitaxy for photodetectors
TiN heater and 2 Al metal layers
Oxide cladding open for exposed waveguides in sensing application

Our team of experts will assist you with the Design Rule Check and will follow-up on the results of your shuttle to support a smooth transfer of your successful designs to a tailored custom prototyping run preparing for production.

For further details about complete list of processes and PDK devices supported in our MPW shuttles, please contact us directly.